Modern Trends in Microelectronics Packaging Reliability Testing.

In this review, recent trends in microelectronics packaging reliability are summarized. We review the technology from early packaging concepts, including wire bond and BGA, to advanced techniques used in HI schemes such as 3D stacking, interposers, fan-out packaging, and more recently developed silicon interconnect fabric integration. This review includes approaches for both design modification studies and packaged device validation. Methods are explored for compatibility in new complex packaging assemblies. Suggestions are proposed for optimizations of the testing practices to account for the challenges anticipated in upcoming HI packaging schemes.

Inference of process variations in silicon photonics from characterization measurements.

Understanding process variations and their impact in silicon photonics remains challenging. To achieve high-yield manufacturing, a key step is to extract the magnitude and spatial distribution of process variations in the actual fabrication, which is usually based on measurements of replicated test structures. In this paper, we develop a Bayesian-based method to infer the distribution of systematic geometric variations in silicon photonics, without requiring replication of identical test structures. We apply this method to characterization data from multiple silicon nitride ring resonators with different design parameters. We extract distributions with standard deviation of 28 nm, 0.8 nm, and 3.8 nm for the width, thickness, and partial etch depth, respectively, as well as the spatial maps of these variations. Our results show that this characterization and extraction approach can serve as an efficient method to study process variation in silicon photonics, facilitating the design of high-yield silicon photonic circuits in the future.

Impact of process variations on splitter-tree-based integrated optical phased arrays.

We consider the impact of intra-wafer systematic spatial variation, pattern density mismatch, and line edge roughness on splitter-tree-based integrated optical phased arrays. These variations can substantially affect the emitted beam profile in the array dimension. We study the effect on different architecture parameters, and the analysis is shown to be consistent with experimental results.

Ex Vivo and In Vivo Imaging Study of Ultrasound Capsule Endoscopy.

Wireless capsule endoscopy (WCE) has revolutionized the capacity for evaluation of the gastrointestinal (GI) tract, but its evaluation is limited to the mucosal surface. To overcome this, ultrasound capsule endoscopy (UCE) that can evaluate the deeper structures beyond the mucosal surface has been proposed and several studies focusing on technology development have demonstrated promising results. However, investigations of the potential for clinical utility of this technology are lacking. This work had two main goals: perform ex vivo and in vivo imaging studies in a swine model to (1) evaluate if acoustic coupling between a capsule with a specific size and GI tract can be achieved only through peristalsis autonomously without any human control and (2) identify key issues and challenges to help guide further research. The images acquired in these studies were able to visualize the wall of the GI tract as well as the structures within demonstrating that achieving adequate acoustic coupling through peristalsis is possible. Critical challenges were identified including level of visualization and area of coverage; these require further in-depth investigation before potential clinical utility of UCE technology can be concluded.

Measuring the Absolute Concentration of Microparticles in Suspension Using High-Frequency B-Mode Ultrasound Imaging.

Concentration measurement of particles in suspension is an important procedure performed in biological and clinical laboratories. Existing methods based on instruments such as hemocytometers, Coulter counters and flow cytometers are often laborious, destructive and incapable of in vivo measurements. On the other hand, an ultrasound-based method can be non-destructive and non-invasive and have the potential for in vivo measurement. In this work, a method is presented that estimates absolute particle concentration from high-frequency B-mode ultrasound images of a sample. The method is based on the detection and characterization of the echoes from individual particles to estimate the effective slice thickness of the image. Calibration using a reference sample is not required because the estimation is entirely image based. The particle type differential is also performed by using the backscatter coefficient of each detected echoes. The method is demonstrated by measuring microsphere suspensions as well as human T-cell suspensions. The proposed method has a wide range of potential clinical applications including non-invasive measurement of cell concentration in biological fluids such as cerebrospinal fluid.

Large-area and high-resolution distortion measurement based on Moiré fringe method for hot embossing process.

A Moiré fringe approach is developed to identify simultaneously the global and local distortions in hot-embossed polymeric samples. A square grid pattern with a pitch of 63.5 microm is hot-embossed on the polymer substrate. When a reference grid, a polymeric film with the same pattern, is placed on top of the sample, a Moiré fringe pattern is observed and recorded by a document scanner. The deviation of the intersections of the fringes from their ideal positions presents the residual distortion in the sample. With different sample-reference rotation angles eight images are acquired for the same sample to achieve the optimal result by a data fitting technique. The validity of this method is proved by the self-consistency of the results from the eight images. To the best of our knowledge, this is the first time distortion quantification has been achieved both in a large area up to that of a scanner and with a high resolution at the level of 1 microm. Furthermore, we do not use any expensive instrument, nor need to measure the sample-reference rotation angle or position the sample precisely, and the process is run automatically by a computer instead of manual operation.